WGR/WTR Readings

06/21/2026 01:02:36

3/1/4030/0/0/0

_1st Flr: City Water Pressure

69.2

PSI

40

90

OK

03/17/2026 18:29:25

4/1/5037/0/0/0

_2nd Flr: AH Scrubber Signet pH

8.9

7.5

9

Inactive

02/15/2026 22:44:47

4/1/5031/0/0/0

_2nd Flr: AH Scrubber Sump Pump Liquid Level

1.0

On/Off

0

2

Inactive

06/21/2026 01:04:29

4/1/5038/0/0/0

_2nd Flr: AH1 Magnehelic 35% First Filter DP

0.700

InH2O

0

1.5

OK

06/21/2026 00:46:15

4/1/5039/0/0/0

_2nd Flr: AH1 Magnehelic 95% Filter DP

0.122

InH2O

0

1

OK

06/21/2026 01:10:02

4/1/5042/0/0/0

_2nd Flr: AH3 Magnehelic 1

0.069

InH2O

0

2

OK

06/21/2026 01:05:36

4/1/5043/0/0/0

_2nd Flr: AH3 Magnehelic 2

0.325

InH2O

0

2

OK

02/04/2026 23:05:55

4/1/5030/0/0/0

_2nd Flr: Cool Fogger WDR

99.1

0

100

Inactive

06/21/2026 00:46:13

4/1/5032/0/0/0

_2nd Flr: Rm 237 Fluid Level 1

0.0

On/Off

0

2

OK

06/21/2026 01:03:51

4/1/5033/0/0/0

_2nd Flr: Rm 237 Fluid Level 2

0.0

On/Off

0

2

OK

06/21/2026 01:08:52

4/1/5034/0/0/0

_2nd Flr: Rm 237 Haskris Chiller

0.0

On/Off

0

2

OK

06/21/2026 01:04:19

4/1/5035/0/0/0

_2nd Flr: Rm 237 Light Sensor 2

0.0

On/Off

0

2

OK

06/21/2026 01:08:00

4/1/5001/0/0/0

_2nd Flr: Wet Scrubber Magnehelic

1.09

PSI

0.8

1.75

OK

03/08/2026 21:57:51

4/1/5036/0/0/0

_2ND_Flr: AH Scrubber Signet Flow

301.1

PSI

275

800

Inactive

3/1/4033/0/0/0

_CDA Flow (CFM): Equipment Pad

No Data

06/21/2026 01:05:09

3/1/4101/0/0/0

_CDA Pressure

118.1

PSI

90

140

OK

06/21/2026 01:03:52

0/1/1201/0/0/0

_Cleanroom: Equip RH

43% / 70.3

F

38 / 65

42 / 75

Upper Ctl Limit

06/21/2026 01:02:13

0/1/1054/0/0/0

_Cleanroom: Rm 101C Rasco AC208V ON Light Indicator

1.0

On/Off

0

2

OK

06/21/2026 01:02:13

0/1/1054/0/0/1

_Cleanroom: Rm 101C Rasco START Light Indicator

1.0

On/Off

0

2

OK

06/21/2026 00:15:05

4/1/5041/0/0/0

_Cleanroom: Rm 101C_Argon_105011

2585

PSI

200

3000

OK

06/21/2026 01:06:40

4/1/5040/0/0/0

_Cleanroom: Rm 101C_Oxygen_105010

380

PSI

200

3000

OK

06/21/2026 00:51:38

0/1/1055/0/0/0

_Cleanroom: Rm 101D Haskris Building Water Fault Indicator

0.0

On/Off

0

2

OK

06/21/2026 01:01:35

3/1/4032/0/0/0

_DI-RO: Flow

-9.52

GPM

0

100

Lower Ctl Limit

06/21/2026 00:58:57

3/1/4031/0/0/0

_DI-RO: Light Sensor

0.0

On/Off

0

2

OK

06/21/2026 01:07:46

3/1/4017/0/0/0

_DI-RO: Resistivity Gauge #18

17.9

Ohm-cm

14

100

OK

06/21/2026 00:58:15

3/1/4019/0/0/0

_DI-RO:DI Water Tank Pressure (Tank 2)

6.44

PSI

4

10

OK

06/21/2026 01:07:55

3/1/4018/0/0/0

_DI-RO:RO Water Tank Pressure (Tank 1)

7.25

PSI

4

10

OK

06/21/2026 00:58:43

0/1/1065/0/0/0

_GPN2 Pressure Gauge After Filters

131.9

PSI

0

400

OK

06/21/2026 01:02:39

3/1/4015/0/0/0

_House Vacuum

-26.10

inHg

-30

-23

OK

06/21/2026 01:00:51

3/1/4016/0/0/0

_House Vacuum: Water Circ Pump Temp

61.5

DEG F

0

85

OK

06/21/2026 01:06:43

3/1/4002/0/0/0

_LN2_Tanks_LI-1-1

217.3

InH2O

0

300

OK

06/21/2026 00:58:41

3/1/4004/0/0/0

_LN2_Tanks_LI-1-2

210.2

InH2O

0

300

OK

05/28/2026 00:03:21

3/1/4006/0/0/0

_LN2_Tanks_LI-1-3

112.0

InH2O

0

300

Inactive

06/21/2026 01:03:33

3/1/4001/0/0/0

_LN2_Tanks_PI-1-1

139.9

PSI

0

300

OK

06/21/2026 01:08:32

3/1/4003/0/0/0

_LN2_Tanks_PI-1-2

58.9

PSI

0

300

OK

01/10/2026 22:46:50

3/1/4005/0/0/0

_LN2_Tanks_PI-1-3

152.0

PSI

0

300

Inactive

06/21/2026 01:07:50

0/1/1060/0/0/0

_N2 Pressure Gauge Canon EX3 Stepper_Chase 121

100.0

PSI

0

110

OK

06/21/2026 01:02:46

3/1/4020/0/0/0

_PCW: Lower Temp Gauge

48.6

DEG F

0

57

OK

06/21/2026 01:01:05

3/1/4009/0/0/0

_PCW: Middle Pressure Gauge

83.0

PSI

67

94

OK

06/21/2026 01:06:57

3/1/4008/0/0/0

_PCW: Upper Temp Gauge

57.0

F

0

160

OK

06/21/2026 01:02:17

0/1/1061/0/0/0

_Pressure Gauge At EMN2 Shut Off_East Wall

122.8

PSI

0

135

OK

06/21/2026 01:09:54

0/1/1062/0/0/0

_Tank 47 GPN2

135.46

PSI

90

400

OK

06/21/2026 01:12:10

0/1/1064/0/0/0

_Tank 47 UHPN2

117.6

PSI

90

400

OK

06/21/2026 01:08:27

0/1/1063/0/0/0

_UHPN2 Pressure Gauge After Filters

111.189

PSI

0

125

OK

06/21/2026 01:04:24

0/1/1006/0/0/0

C_AJA UHV Ebeam_122_Ar_105288

2669

PSI

200

2800

OK

06/21/2026 01:07:46

0/1/1012/0/0/0

C_AJACovaporator_129_Ar_105249

1043

PSI

200

2800

OK

06/21/2026 01:02:53

0/1/1016/0/0/0

C_Beneq ALD Deposition_132_Ar_105250

2004

PSI

300

2800

OK

06/21/2026 01:02:38

0/1/1101/0/0/0

C_Cabinet2_Gas Bunker_100% Silane_102089

700

PSI

150

1000

OK

06/21/2026 01:06:41

0/1/1102/0/0/0

C_Cabinet2_Gas Bunker_2% Silane_102089

549

PSI

200

3000

OK

06/21/2026 01:07:26

0/1/1103/0/0/0

C_Cabinet3_Gas Bunker_Ethylene_102090

598

PSI

400

3000

OK

06/21/2026 00:59:01

0/1/1021/0/0/0

C_DDC_133_CO2_105376

820

PSI

350

2800

OK

06/21/2026 01:07:51

0/1/1022/0/0/0

C_DDC_133_O2_105375

2004

PSI

300

2800

OK

06/21/2026 01:10:50

0/1/1004/0/0/0

C_EX3_121_F 0.95%/Kr 1.25%/Ne Balance_

204

PSI

300

2800

Error-28

06/21/2026 01:01:07

0/1/1003/0/0/0

C_EX3_121_He_

499

PSI

200

2800

OK

06/21/2026 01:01:21

0/1/1002/0/0/0

C_EX6_102_He_NoPVS

2159

PSI

200

2800

OK

06/21/2026 01:03:36

0/1/1001/0/0/0

C_EX6_102_Kr 1.25%/Ne Balance_NoPVS

387

PSI

300

2600

OK

06/21/2026 00:59:41

0/1/1014/0/0/0

C_FC300 Flip Chip Bonder_132_4% H2/He_105254

1627

PSI

300

3000

OK

06/21/2026 01:02:02

0/1/1009/0/0/0

C_General Use ICP Etchers_126_Ar_105008

1929

PSI

200

2800

OK

06/21/2026 01:11:10

0/1/1008/0/0/0

C_General Use ICP Etchers_126_He_105009

2016

PSI

200

2800

OK

06/21/2026 01:11:17

0/1/1023/0/0/0

C_HummerSputteringSystem_137_Ar_105255

1003

PSI

200

2800

OK

06/21/2026 00:59:01

0/1/1011/0/0/0

C_IR Group ICP Etcher_126_Ar_105282

2095

PSI

200

2800

OK

06/21/2026 00:59:19

0/1/1010/0/0/0

C_IR Group ICP Etcher_126_He_105284

564

PSI

200

2800

OK

06/21/2026 01:04:10

0/1/1015/0/0/0

C_Ontos 7 Oxide Removal_132_He_105253

2540

PSI

200

2800

OK

06/21/2026 00:58:31

0/1/1018/0/0/0

C_Oxford HD PECVD_133_Ar_105269

1685

PSI

200

2800

OK

06/21/2026 01:04:15

0/1/1019/0/0/0

C_Oxford HD PECVD_133_He_105270

754

PSI

200

2800

OK

06/21/2026 01:12:24

0/1/1020/0/0/0

C_Oxford HD PECVD_133_SF6_105271

300

PSI

140

350

OK

06/21/2026 00:58:54

0/1/1013/0/0/0

C_PlasmaTech Orange RIE_130_Ar_105272

1658

PSI

200

2800

OK

06/21/2026 01:04:23

0/1/1106/0/0/0

C_PlasmaTherm PECVD & High Density ICPCVD_138_Cylinder Pressure_N2O

779

PSI

200

3000

OK

06/21/2026 01:09:06

0/1/1026/0/0/0

C_PlasmaTherm PECVD & High Density ICPCVD_138_Line Pressure_N2O

19

PSI

5

25

OK

06/21/2026 01:07:07

0/1/1027/0/0/0

C_PlasmaTherm PECVD_138_CF4/Oxygen 8% NOS_105260

1840

PSI

350

4000

OK

06/21/2026 01:06:32

0/1/1028/0/0/0

C_PlasmaTherm PECVD_138_He_105259

1600

PSI

200

4000

OK

06/21/2026 00:58:51

0/1/1017/0/0/0

C_RTP_121_N2/5% H2_NoPVS

1751

PSI

500

3000

OK

06/21/2026 01:11:37

0/1/1007/0/0/0

C_STJ Fluorine RIE & Apex ICP_125_Ar_105243

908

PSI

200

2800

OK

06/21/2026 01:11:24

0/1/1029/0/0/0

C_STS Deep Trench DRIE_138_Ar_105266

1290

PSI

200

4000

OK

06/21/2026 01:11:55

0/1/1024/0/0/0

C_STS Deep Trench DRIE_138_C4F8_102613

20

PSI

5

300

OK

06/21/2026 01:10:18

0/1/1030/0/0/0

C_STS Deep Trench DRIE_138_He_105265

482

PSI

200

4000

OK

06/21/2026 01:06:51

0/1/1025/0/0/0

C_STS Deep Trench DRIE_138_SF6_NoPVS

326

PSI

200

3000

OK

06/21/2026 00:59:48

0/1/1035/0/0/0

C_Supply_Pressure_152_Near_CHF3

625

PSI

150

1500

OK

06/21/2026 01:00:10

0/1/1104/0/0/0

C_SystemA_Gas Bunker_H2_102092

971

PSI

500

3000

Error-27

06/21/2026 00:59:34

0/1/1105/0/0/0

C_SystemB_Gas Bunker_H2_102093

1946

PSI

500

3000

OK

02/21/2026 07:36:29

0/1/1056/0/0/1

C_Weigh_Scale_122_Not_Connected_CH2

0.2

LBS

0

300

Inactive

06/21/2026 01:12:05

0/1/1041/0/0/1

C_Weigh_Scale_125_CCL2F2

19.1

LBS

5

300

OK

06/21/2026 01:12:05

0/1/1041/0/0/0

C_Weigh_Scale_125_CF4

11.4

LBS

3

300

OK

06/21/2026 01:03:32

0/1/1040/0/0/0

C_Weigh_Scale_125_CHF3

31.8

LBS

3

300

OK

06/21/2026 01:03:32

0/1/1040/0/0/1

C_Weigh_Scale_125_SF6

40.1

LBS

3

300

OK

06/21/2026 01:00:34

0/1/1051/0/0/1

C_Weigh_Scale_126_Not_Connected

0.0

LBS

0

300

OK

06/21/2026 01:00:34

0/1/1051/0/0/0

C_Weigh_Scale_126_SF6

11.9

LBS

3

300

OK

06/21/2026 01:08:27

0/1/1049/0/0/1

C_Weigh_Scale_130_2nd CHANNEL NOT IN USE

0.0

LBS

0

300

OK

06/21/2026 01:06:20

0/1/1050/0/0/0

C_Weigh_Scale_130_CF4

21.2

LBS

3

300

OK

06/21/2026 01:06:20

0/1/1050/0/0/1

C_Weigh_Scale_130_Not_Connected

0.1

LBS

0

300

OK

06/21/2026 01:08:27

0/1/1049/0/0/0

C_Weigh_Scale_130_SF6_Cobra Oxford ICP Etcher

6.3

LBS

3

300

OK

06/21/2026 01:05:22

0/1/1046/0/0/0

C_Weigh_Scale_138_C4F8

29.1

LBS

3

300

OK

06/21/2026 01:04:21

0/1/1042/0/0/0

C_Weigh_Scale_138_Dichlorosilane

13.2

LBS

5

300

OK

0/1/1045/0/0/0

C_Weigh_Scale_138_HBr

LBS

No Data

06/21/2026 01:04:21

0/1/1042/0/0/1

C_Weigh_Scale_138_Not_Connected

0.3

LBS

0

300

OK

06/21/2026 01:05:22

0/1/1046/0/0/1

C_Weigh_Scale_138_SF6

19.9

LBS

3

300

OK

0/1/1045/0/0/1

C_Weigh_Scale_138_T30_Not_Connected

LBS

No Data

06/21/2026 01:01:48

0/1/1053/0/0/1

C_Weigh_Scale_143A_C4F8

11.0

LBS

3

300

OK

06/21/2026 01:01:48

0/1/1053/0/0/0

C_Weigh_Scale_143A_SF6

34.5

LBS

3

300

OK

06/21/2026 01:00:28

0/1/1052/0/0/0

C_Weigh_Scale_152_Far C4F8

36.0

LBS

3

300

OK

06/21/2026 01:09:24

0/1/1047/0/0/1

C_Weigh_Scale_152_Far_CF4

13.6

LBS

3

300

OK

06/21/2026 01:09:24

0/1/1047/0/0/0

C_Weigh_Scale_152_Far_CHF3

15.3

LBS

3

300

OK

06/21/2026 00:45:04

0/1/1044/0/0/1

C_Weigh_Scale_152_Near_C4F8

30.5

LBS

3

300

OK

06/21/2026 01:07:25

0/1/1043/0/0/1

C_Weigh_Scale_152_Near_CF4

18.0

LBS

3

300

OK

06/21/2026 01:07:25

0/1/1043/0/0/0

C_Weigh_Scale_152_Near_CHF3

27.3

LBS

3

300

OK

06/21/2026 01:00:28

0/1/1052/0/0/1

C_Weigh_Scale_152_Not_Connected

0.2

LBS

0

300

OK

06/21/2026 00:59:29

0/1/1048/0/0/0

C_Weigh_Scale_CH 130_BCL3

5.9

LBS

3

300

OK

06/21/2026 01:03:30

0/1/1039/0/0/0

C_Weigh_Scale_CH 130_Chlorine

7.8

LBS

5

300

OK

02/21/2026 07:36:29

0/1/1056/0/0/0

C_Weigh_Scale_Chase 122_SAMCO RIE_CF4

17.8

LBS

3

300

Inactive

06/21/2026 00:45:04

0/1/1044/0/0/0

C_Weigh_Scale_Versaline DRIE_152_Near_SF6

25.9

LBS

3

300

OK

06/21/2026 00:59:29

0/1/1048/0/0/1

CHANNEL NOT IN USE

0.0

LBS

0

OK

06/21/2026 01:03:30

0/1/1039/0/0/1

CHANNEL NOT IN USE

0.0

LBS

0

OK

3/1/4304/0/0/0

Flow Meter_Not Installed Ch 1

GPM

No Data

3/1/4304/0/0/1

Flow Meter_Not Installed Ch 2

GPM

No Data

0/1/1202/0/0/0

High Precision Humidity Sensor_Not Installed

mAMPS

No Data

0/1/1202/0/0/1

High Precision Temperature Sensor_Not Installed

mAMPS

No Data

0/1/1005/0/0/0

Z_(not installed - interference)

mAMPS

No Data

0/1/1031/0/0/0

Z_STS Deep Trench DRIE_138_4% NOS_Not_Installed

No Data